ABOUT WS - 712
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Specifications 规格 |
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|---|---|
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Wafer Size 晶圆尺寸 |
6"、8"、12" |
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Chip Size(mm) 晶粒尺寸 |
0.15mm~4.5mm / 0.25mm~10mm 0.5mm~15mm |
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Chip Thickness 晶粒厚度 |
≧ 0.1 mm |
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Accuracy 置晶精度 |
XY≦±30μm, θ≦±1° |
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Pick and place force |
30g ~ 100g |
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Loading/Unloading 载入/载出 |
Automatic |
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Static Protection 静电防护 |
100mm, ±1000V ~ ±100V<5sec |
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Compressed Air 缩空气 |
5 kg/cm2 |
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Vacuum 真空 |
> 0.8kg/cm |
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Power 电压 |
220 VAC /Single Phase, 6A(Operation), 8A(Peak), 50/60 Hz |
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Power 功率 |
1500 W |
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Weight 重量 |
1360 kg |
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Dimension(W*D*H) 尺寸 |
1550*1500*1800 (mm) |